TCE 가 실리콘 산화공정에 미치는 영향 = The effects of TCE on the silicon oxidation process

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dc.contributor.advisor김충기-
dc.contributor.advisorKim, Choong-Ki-
dc.contributor.author최태현-
dc.contributor.authorChoi, Tai-Hyun-
dc.date.accessioned2011-12-14T02:21:13Z-
dc.date.available2011-12-14T02:21:13Z-
dc.date.issued1982-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=63408&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/39603-
dc.description학위논문(석사) - 한국과학기술원 : 전기 및 전자공학과, 1982.2, [ [ii], 46, [50] p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.titleTCE 가 실리콘 산화공정에 미치는 영향 = The effects of TCE on the silicon oxidation process-
dc.typeThesis(Master)-
dc.identifier.CNRN63408/325007-
dc.description.department한국과학기술원 : 전기 및 전자공학과, -
dc.identifier.uid000801280-
dc.contributor.localauthor김충기-
dc.contributor.localauthorKim, Choong-Ki-
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EE-Theses_Master(석사논문)
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