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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Theses_Master(석사논문)

램프 가열 방식을 이용한 LPCVD 시스템의 설계 및 제작과 폴리 실리콘 증착Design and implementation of lamp-heated LPCVD system and poly-Si deposition

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하용민 / Ha, Yong-Min
Advisors
김충기; Kim, Choong-Ki
Description
한국과학기술원 : 전기 및 전자공학과,
Publisher
한국과학기술원
Issue Date
1990
Identifier
67387/325007 / 000881524
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전기 및 전자공학과, 1990.2, [ iii, 55 p. ]

URI
http://hdl.handle.net/10203/39176
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67387&flag=dissertation
Appears in Collection
EE-Theses_Master(석사논문)
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