학위논문(석사) - 한국과학기술원 : 전기및전자공학전공, 2008. 8., [ vii, 69 p. ]
MEMS; actuator; pre-charging; 멤스; 미세전자기계시스템; 엑츄에이터; 선충전; MEMS; actuator; pre-charging; 멤스; 미세전자기계시스템; 엑츄에이터; 선충전
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.