Self-aligned emitter-base contact과 base pad isolation을 이용한 초고주파용 InP/InGaAs HBT제작Fabrication of high-frequency InP/InGaAs HBTs using self-aligned emitter-base contact and base pad isolation

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dc.contributor.advisor양경훈-
dc.contributor.advisorYang, Kyoung-Hoon-
dc.contributor.author송용주-
dc.contributor.authorSong, Yong-Joo-
dc.date.accessioned2011-12-14T01:50:28Z-
dc.date.available2011-12-14T01:50:28Z-
dc.date.issued2002-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=174116&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/37586-
dc.description학위논문(석사) - 한국과학기술원 : 전기및전자공학전공, 2002.2, [ 77 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subject베이스-콜렉터 커패시턴스-
dc.subject자기 정렬 전극-
dc.subject이종접합 바이폴라 트랜지스터-
dc.subject베이스 패드-
dc.subjectbase pad isolation-
dc.subjectextrinsic base-collector capacitance-
dc.subjectself-aligned emitter-base contact-
dc.subjectHeterojunction Bipolar Transistors(HBTs)-
dc.titleSelf-aligned emitter-base contact과 base pad isolation을 이용한 초고주파용 InP/InGaAs HBT제작-
dc.title.alternativeFabrication of high-frequency InP/InGaAs HBTs using self-aligned emitter-base contact and base pad isolation-
dc.typeThesis(Master)-
dc.identifier.CNRN174116/325007-
dc.description.department한국과학기술원 : 전기및전자공학전공, -
dc.identifier.uid000993292-
dc.contributor.localauthor양경훈-
dc.contributor.localauthorYang, Kyoung-Hoon-
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EE-Theses_Master(석사논문)
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