<110> 실리콘 기판상에 형성된 붕소확산층 캔틸레버를 이용한 SPM용 탐침의 제작SPM probe tips using heavily boron-doped silicon cantilevers realized in <110> bulk silicon wafer
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 윤의식 | - |
| dc.contributor.advisor | Yoon, Eui-Sik | - |
| dc.contributor.author | 조일주 | - |
| dc.contributor.author | Cho, Il-Joo | - |
| dc.date.accessioned | 2011-12-14T01:46:31Z | - |
| dc.date.available | 2011-12-14T01:46:31Z | - |
| dc.date.issued | 2000 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=157494&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/37335 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전기및전자공학전공, 2000.2, [ iii, 60 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | <110> 실리콘 기판상에 형성된 붕소확산층 캔틸레버를 이용한 SPM용 탐침의 제작 | - |
| dc.title.alternative | SPM probe tips using heavily boron-doped silicon cantilevers realized in <110> bulk silicon wafer | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 157494/325007 | - |
| dc.description.department | 한국과학기술원 : 전기및전자공학전공, | - |
| dc.identifier.uid | 000983569 | - |
| dc.contributor.localauthor | 윤의식 | - |
| dc.contributor.localauthor | Yoon, Eui-Sik | - |
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