<110> 실리콘 기판상에 형성된 붕소확산층 캔틸레버를 이용한 SPM용 탐침의 제작 = SPM probe tips using heavily boron-doped silicon cantilevers realized in <110> bulk silicon wafer

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Advisors
윤의식researcherYoon, Eui-Sikresearcher
Description
한국과학기술원 : 전기및전자공학전공,
Publisher
한국과학기술원
Issue Date
2000
Identifier
157494/325007 / 000983569
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전기및전자공학전공, 2000.2, [ iii, 60 p. ]

URI
http://hdl.handle.net/10203/37335
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=157494&flag=dissertation
Appears in Collection
EE-Theses_Master(석사논문)
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