유도 결합 플라즈마를 이용한 HgCdTe 건식 식각에 관한 연구Study on HgCdTe dry etching using inductively coupled plasma
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이희철 | - |
| dc.contributor.advisor | Lee, Hee-Chul | - |
| dc.contributor.author | 김태식 | - |
| dc.contributor.author | Kim, Tae-Sik | - |
| dc.date.accessioned | 2011-12-14T01:45:03Z | - |
| dc.date.available | 2011-12-14T01:45:03Z | - |
| dc.date.issued | 1999 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=156256&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/37242 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1999.8, [ [ii], 56 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 유도결합 플라즈마 | - |
| dc.subject | 건식 식각 | - |
| dc.subject | 고분자 | - |
| dc.subject | Polymer | - |
| dc.subject | ICP | - |
| dc.subject | Dry etching | - |
| dc.title | 유도 결합 플라즈마를 이용한 HgCdTe 건식 식각에 관한 연구 | - |
| dc.title.alternative | Study on HgCdTe dry etching using inductively coupled plasma | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 156256/325007 | - |
| dc.description.department | 한국과학기술원 : 전기및전자공학과, | - |
| dc.identifier.uid | 000973185 | - |
| dc.contributor.localauthor | 이희철 | - |
| dc.contributor.localauthor | Lee, Hee-Chul | - |
- Appears in Collection
- EE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.