학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1999.2, [ ii, 31 p. ]
저온공정; EEPROM; 박막트랜지스터; 다결정실리콘; 플라즈마산화막; Plasma oxide; Low temperature process; EEPROM; TFT; Polysilicon
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