E-beam lthography 를 이용한 나노 부유 게이트 소자 제작Fabrication of nano-floating gate memory device using E-beam lithography
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 권영세 | - |
| dc.contributor.advisor | Kwon, Young-Se | - |
| dc.contributor.author | 박진성 | - |
| dc.contributor.author | Park, Jin-Sung | - |
| dc.date.accessioned | 2011-12-14T01:41:11Z | - |
| dc.date.available | 2011-12-14T01:41:11Z | - |
| dc.date.issued | 1997 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=128590&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/36997 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1997.8, [ [iii], 54, xix p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | E-beam lthography 를 이용한 나노 부유 게이트 소자 제작 | - |
| dc.title.alternative | Fabrication of nano-floating gate memory device using E-beam lithography | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 128590/325007 | - |
| dc.description.department | 한국과학기술원 : 전기및전자공학과, | - |
| dc.identifier.uid | 000953240 | - |
| dc.contributor.localauthor | 권영세 | - |
| dc.contributor.localauthor | Kwon, Young-Se | - |
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- EE-Theses_Master(석사논문)
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