학위논문(석사) - 한국과학기술원 : 전기 및 전자공학과, 1996.2, [ iv, 56 p. ]
화학-기계적 연마; 다결정실리콘; Buried island thin film transistor(BITFT); Chemical mechanical polishing(CMP); 매몰 박막 트랜지스터; Polycrystalline silicon
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