학위논문(박사) - 한국과학기술원 : 전기및전자공학과, 1999.8, [ iv, 120 p. ]
Photoresist; TFT; Polysilicon; Self-alinged offset; Staggered; 스태거형; 감광막; 박막트랜지스터; 다결정실리콘; 자기 정렬 오프셋
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