학위논문(박사) - 한국과학기술원 : 전기및전자공학전공, 2006.2, [ ix, 102 p. ]
bolometers,uncooled infrared detector; Actuators; microelectromechanical devices; 미소기전소자; 냉각형 적외선 감지 소자; 볼로메타; 엑추에이터
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