Direct laser patterning on opaque substrate in two-photon polymerization

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Publisher
POLYMER SOC KOREA
Issue Date
2006-04
Language
ENG
Article Type
Article
Keywords

NANOIMPRINT LITHOGRAPHY; FABRICATION; PHOTOPOLYMERIZATION; MICROSTRUCTURES; FEATURES; NANOFABRICATION; MICROMACHINES; RESOLUTION

Citation

MACROMOLECULAR RESEARCH, v.14, pp.245 - 250

ISSN
1598-5032
DOI
10.1007/BF03218517
URI
http://hdl.handle.net/10203/3274
Appears in Collection
PH-Journal Papers(저널논문)
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