Field emission characteristics of multiwalled carbon nanotubes grown at low temperatures using electron cyclotron resonance chemical vapor deposition

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Vertically aligned multiwalled carbon nanotubes were synthesized by electron cyclotron resonance chemical vapor deposition on Ni-coated glass substrates at temperatures as low as 400 degreesC. Negative self-biases were induced to the substrates by radio frequency plasma to give ion bombardment to the growing surface. An increase of self-bias voltages from -50 to -200 V resulted in an evolution of the microstructures from amorphous carbon to nanorods, subsequently to nanotubes. Nanotubes grown above - 150 V were more straight in morphology and better in crystallinity than nanorods grown at - 100 V. In the field emission (FE) measurements, the electric fields to obtain 1 muA/cm(2) were 4.6 and 11.1 V/mum for the nanorods and nanotubes grown at - 100 and - 200 V, respectively. The emission areas, calculated from the Fowler-Nordheim plots, were much larger in the nanorods than the nanotubes. It is considered that a larger amount of crystalline defects in nanorods plays a major role in improving their FE characteristics. (C) 2003 American Vacuum Society.
Publisher
A V S AMER INST PHYSICS
Issue Date
2003-07
Language
ENG
Article Type
Article; Proceedings Paper
Citation

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.21, no.4, pp.1660 - 1664

ISSN
1071-1023
URI
http://hdl.handle.net/10203/3263
Appears in Collection
MS-Journal Papers(저널논문)
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