학위논문(석사) - 한국과학기술원 : 전기및전자공학부, 2023.2,[viii, 28 p. :]
MEMS▼aMechanical Switch▼aCryogenic▼aCirculator▼aQuantum Computer; MEMS▼a기계식 스위치▼a극저온▼a서큘레이터▼a양자 컴퓨터
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