텅스텐 건식에칭에서 $CF_4/O_2$가스계에 CO 와 $CO_2$첨가 효과Effect of addition of CO and $CO_2$ to $CF_4/O_2$ etching system for tungsten etching

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Advisors
정인재우성일Chung, In-JaeWoo, Seong-Ihl
Description
한국과학기술원 : 화학공학과,
Publisher
한국과학기술원
Issue Date
1991
Identifier
67724/325007 / 000891024
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 화학공학과, 1991.2, [ [xv], 127 p. ]

URI
http://hdl.handle.net/10203/30410
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67724&flag=dissertation
Appears in Collection
CBE-Theses_Master(석사논문)
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