Complementary metal oxide semiconductor image sensor and method for fabricating the sameCMOS 이미지센서 및 이의 제조방법

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 68
  • Download : 0
Provided are a CMOS image sensor and a method for fabricating the same. The image sensor comprises a light receiving element, and a nanopillar formed at an upper end of the light receiving element. A method for fabricating a CMOS image sensor, the method comprising steps of: inducing a plasma discharge and forming nanodusts in a light receiving region; etching the light receiving region using the nanodusts as a mask; and removing the nanodusts.
Assignee
한국과학기술원
Country
CC (Cocos (Keeling) Islands)
Application Date
2006-12-25
Application Number
200610168097.2
Registration Date
2010-05-19
Registration Number
001996605
URI
http://hdl.handle.net/10203/303690
Appears in Collection
EE-Patent(특허)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0