Variable view imaging system with combination of telecentric scanner and double wedge prisms

Abstract

A variable view imaging system for observation of micro object with variable view orientation and position includes a telecentric lens group, a scanning mirror, wedge prisms, a deformable mirror and related optical elements. The combination of a scanning mirror and a telecentric lens group decouples the motion of scanning mirror and the view angle. The view angle is determined only by the angle of the wedge prisms. This design increases the zenith angle of the view and simplifies the kinematics of the system. The wedge prisms and the scanning mirror can supply a flexible view in a compact way. The wavefront error induced by the wedge prisms is corrected by the deformable mirror. In order to achieve the desired view state during operation, the scanning mirror angle and the wedge prisms angle are calculated iteratively based on the kinematics and Jacobian matrix of system.