Nanolithographic patterning for spin data storage and bio devices

Abstract

This thesis concerns the nanofabrication and characterizations of metal nanopatterns for the applications of ultrahigh density spin data storage and bio device by using both the “top-down” and “bottom-up” approaches. For magnetic patterns, Co/Pd multilayer nanodot arrays with the wide size range in diameter were successfully fabricated through the optimization of the colloidal particle and the RIE process. Additionally, elliptical Co dot and ring structure also were prepared by imprint lithography. Magnetic property of patterns was characterized according to center to center distance, shape or size of patterns by magneto-optical Kerr effect and magnetic force microscope measurements. On the other hands, we focus on the bio applications of the fabricated patterns and examined the characteristic behavior of localized surface plasmon resonance of Au, AuAg dot and ring arrays in response to refractive index change. To do this, patterned arrays of Au rings and Au, AuAg dots with various feature scales were fabricated over large areas. A spectroscopic study on these patterns suggested that these patterned structures can be successfully used for probing biomolecules such as the DNA-DNA or biotin-straptavidin interaction.