Nanolithographic patterning for spin data storage and bio devices = 정보저장 및 바이오 소자를 위한 나노패턴 기술

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This thesis concerns the nanofabrication and characterizations of metal nanopatterns for the applications of ultrahigh density spin data storage and bio device by using both the “top-down” and “bottom-up” approaches. For magnetic patterns, Co/Pd multilayer nanodot arrays with the wide size range in diameter were successfully fabricated through the optimization of the colloidal particle and the RIE process. Additionally, elliptical Co dot and ring structure also were prepared by imprint lithography. Magnetic property of patterns was characterized according to center to center distance, shape or size of patterns by magneto-optical Kerr effect and magnetic force microscope measurements. On the other hands, we focus on the bio applications of the fabricated patterns and examined the characteristic behavior of localized surface plasmon resonance of Au, AuAg dot and ring arrays in response to refractive index change. To do this, patterned arrays of Au rings and Au, AuAg dots with various feature scales were fabricated over large areas. A spectroscopic study on these patterns suggested that these patterned structures can be successfully used for probing biomolecules such as the DNA-DNA or biotin-straptavidin interaction.
Advisors
Yang, Seung-Manresearcher양승만researcher
Description
한국과학기술원 : 생명화학공학과,
Publisher
한국과학기술원
Issue Date
2007
Identifier
263443/325007  / 020025812
Language
eng
Description

학위논문(박사) - 한국과학기술원 : 생명화학공학과, 2007.2, [ vii, 103 p. ]

Keywords

magnetic property; nanopatterning; LSPR; 표면플라즈몬공명; 자기적 성질; 나노패턴

URI
http://hdl.handle.net/10203/28997
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=263443&flag=dissertation
Appears in Collection
CBE-Theses_Ph.D.(박사논문)
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