DSpace at KOASAS: Anti-Ferroelectric HZO Blocking Layer in Charge Trap Flash Memory Device

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Anti-Ferroelectric HZO Blocking Layer in Charge Trap Flash Memory Device

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Shin, Sung Won / Cho, Byung-Jin researcher / Shin, Eui Joong

Publisher: The Japan Society of Applied Physics

Issue Date: 2021-11-15

Language: English

Citation: 2021 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ELECTRON DEVICES

URI: http://hdl.handle.net/10203/289421

Appears in Collection: EE-Conference Papers(학술회의논문)

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