학위논문(박사) - 한국과학기술원 : 생명화학공학과, 2002.2, [ x, 137 p. ]
molecular dynamics simulations; sputtering; plasma etching; computer simulation; 컴퓨터 시뮬레이션; 분자모델링; 스퍼터링; 플라즈마 에칭
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