Adiabatic coupling based broadband MEMS actuated silicon photonic switch design

Abstract

Silicon photonics switches have garnered attention to be one of the most promising technology that may replace electronic switches. Since Silicon photonics is a powerful platform that can fabricate a photonic integrated circuit on a single chip, studies about various silicon photonic switching engines such as Mach-Zehnder interferometer (MZI) switching engine, micro-ring resonator (MRR) switching engine, and recently, micro-electro-mechanical-system (MEMS) switching engine have been conducted. However, various factors such as large size, large power loss, and costly fabrication process limit the overall performance of large-scale array obtained through mass production. In this thesis, adiabatic coupler based broadband MEMS actuated optical switch is designed and fabricated based on the standard fabrication process. Both electro-mechanical simulation and optical simulation were conducted to design the parameters and predict the properties of the switch. Etched result was identified through SEM images, and the electro-mechanical response was observed. Optical measurement is in progress, but the results of optical simulation indicate that an enhancement of optical switching performance may be achieved through an optimization of the design. Such design’s optical loss is expected to be 0.48 dB or lower, with its extinction ratio being 25 dB or higher in 1300 nm to 1550 nm wide wavelength range.