A simple terahertz time-domain signal reconstruction algorithm for thickness measurement in real-world applications

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We propose a simple signal reconstruction algorithm for terahertz time-domain spectroscopy in ambient atmosphere for application to time-of-flight thickness measurement. Time-of-flight measurement method is a very basic method of measuring thickness, but it has the advantage of being very fast. Therefore, it is often used for rapid measurement in industrial environment. The echo signal is buried in the spurious oscillations of the ambient atmosphere because of water vapor. We successfully found the echo signal and measured the thickness of the sample, silicon wafers and various type of explosive materials, without any prior information in humid air. (C) 2019 Elsevier Ltd. All rights reserved.
Publisher
ELSEVIER SCI LTD
Issue Date
2020-02
Language
English
Article Type
Article
Citation

MEASUREMENT, v.151

ISSN
0263-2241
DOI
10.1016/j.measurement.2019.107201
URI
http://hdl.handle.net/10203/270263
Appears in Collection
ME-Journal Papers(저널논문)
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