Fabrication and Characterization of Ferroelectric Hafnia Using PEALD

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Publisher
DB하이텍, 한국반도체산업협회, 한국반도체연구조합
Issue Date
2019-02-15
Language
English
Citation

제26회 한국반도체학술대회

URI
http://hdl.handle.net/10203/269887
Appears in Collection
MS-Conference Papers(학술회의논문)
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