Parylene based thin-film microfluidic lens array fabricated by iCVD nano-adhesive bonding

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Microfluidic lenses that have been fabricated using PDMS have serious limitations due to the high gas permeability of the material, which leads to evaporation of the filling liquid and air bubble formation. We report a fast and reliable method of fabricating flexible, thin-film parylene microfluidic devices, and their application in tunable microfluidic lens arrays. A parylene microfluidic lens was built by molding and bonding 1.4-mu m-thick parylene layers using nano-adhesivelayers deposited by initiated chemical vapor deposition (iCVD). The focal length of the lens could be tuned by changing the radius of curvature of the lens and/or changing the refractive indices of the filling liquids. The parylene microfluidic lens showed a large range of focal length tuning, and high reproducibility over hundreds of cycles.
Publisher
ELSEVIER SCI LTD
Issue Date
2019-10
Language
English
Article Type
Article
Citation

POLYMER, v.181, pp.121763

ISSN
0032-3861
DOI
10.1016/j.polymer.2019.121763
URI
http://hdl.handle.net/10203/268912
Appears in Collection
CBE-Journal Papers(저널논문)NT-Journal Papers(저널논문)
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