학위논문(석사) - 한국과학기술원 : 전기및전자공학부, 2018.2,[vii, 48 p. :]
Thermoelectric▼aRF magnetron▼asputtering▼asilicide▼aseebeck effect▼ahetero-structure▼athin film; 에너지 하베스팅▼a제백 계수▼a열전 박막 소자
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