Wafer distribution system for a clean room using a novel magnetic suspension technique

Abstract

A linear transport system, which is capable of reducing the weight of a moving carrier by separating power-supplying devices, is developed by using a new magnetic levitation technique, This system is designed to distribute a wafer between semiconductor fabrication process modules in clean rooms, because it can eliminate particles and oil contamination that normally exist in conventional transporter systems due to rubbing of mechanical components. The transport system consists of a wafer carrier, two Levitation tracks, tyro stabilization tracks, and a propelling system. Levitation is achieved by using opposing forces produced between electromagnet tracks and permanent magnets, Stabilization is achieved by using a simple feedback control, The continuous propelling force is obtained by sending specific current patterns to the propulsion coils, The dynamic model of the transport system is presented, and it is verified by experiment, The system performance is experimentally investigated.