Janus microparticle has opposite physical or chemical property in itself. Recently, several methods such as using microfluidic were reported to fabricate Janus microparticle attracted attention for various research field such as biochemistry, electric device and optical science. However, fabrication of Janus microparticle has some difficulties from less than few micro-scale size. Additionally, because the previous fabrication methods mostly focused on isotropic shaped, there is limitations for fabrication of anisotropic shaped Janus microparticle. In this thesis, after fabrication of anisotropic microparticles from micromolding process, surfaces of the microparticles were selectively modified to assign chemical and physical characteristics via initiated chemical deposition (iCVD). By control of the Janus microparticle characteristic, self-assembly between the Janus microparticles for 3D clustering and self-folding of the Janus microparticles according to environmental change were studied. This results are anticipated to contribute to design and manufacture 3D microstructure using Janus microparticles.