Method for separating nanogenerator and method for manufacturing nanogenerator using the same동일한 것을 사용하는 나노폭탄을 분리시키기 위한 방법과 나노폭탄을 제조하기 위한 방법

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Provided is a method for separating a nanogenerator, which includes laminating a buffer layer on a sacrificial substrate, making a nanogenerator on the buffer layer, laminating a metal layer on the nanogenerator and separating the nanogenerator from the buffer layer. Here, a nanogenerator is separated by using a stress difference between the sacrificial substrate and the metal layer, instead of an existing method in which a nanogenerator is separated from the sacrificial substrate by means of wet etching or the like. In particular, according to a difference between a tensile stress at the metal layer such as nickel and a compressive stress at the lower silicon substrate, the nanogenerator is intactly separated from the silicon oxide layer serving as a buffer layer. Therefore, the nanogenerator may be separated from the sacrificial substrate in a mechanical way, which is safer and more economic in comparison to an existing chemical separation method using an etching solution. Further, it is also possible to avoid a damage of the nanogenerator caused by an etching solution.
Assignee
KAIST
Country
US (United States)
Issue Date
2019-01-01
Application Date
2014-11-11
Application Number
14538154
Registration Date
2019-01-01
Registration Number
10166400
URI
http://hdl.handle.net/10203/261653
Appears in Collection
MS-Patent(특허)
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