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Results 1-1 of 1 (Search time: 0.002 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
VCM을 이용한 wafer용 xyθ 미세구동기의 설계와 제어 = The design and control of xyθ fine stage using VCM for wafer stagelink

김동민; Kim, Dong-Min; 권대갑; Gweon, Dae-Gab, 한국과학기술원, 2002

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