Achieving high-resolution pressure mapping via flexible GaN/ZnO nanowire LEDs array by piezo-phototronic effect

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Simulating human tactile sensing through high-resolution electronics is a significant and challenging topic in artificial intelligence. A flexible p-GaN film/n-ZnO nanowire light-emitting diode (LED)-based pressure sensor array, with the merits of flexibility, high resolution, good transparency, fast response, stability, and lightweight, is fabricated through laser lift-off (LLO) process and hydrothermal growth of ZnO nanowires directly on a flexible GaN film, which is used for acquiring the two-dimensional (2D) pressure distribution mapping by reading the illumination intensities from all LED pixels parallelly. The intensity of each pixel composed by a GaN/ZnO nanowire heterostructure LED can be enhanced by the local compressive strain based on piezo-phototronic effect. A high spatial resolution of 2.6 mu m and a fast response time of 180 ms were obtained, and also the sensor arrays can still function well after 4000 bending circles. The promising flexible LEDs-based pressure sensor array gains some technological innovations in the field of tactile sensing, with potential applications in smart skin, biomedicine, optical MEMS, and touchpad technology.
Publisher
ELSEVIER SCIENCE BV
Issue Date
2019-04
Language
English
Article Type
Article
Citation

NANO ENERGY, v.58, pp.633 - 640

ISSN
2211-2855
DOI
10.1016/j.nanoen.2019.01.076
URI
http://hdl.handle.net/10203/253945
Appears in Collection
MS-Journal Papers(저널논문)
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