Multi-degree-of-freedom displacement measurement system for milli-structures

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dc.contributor.authorBae, EWko
dc.contributor.authorKim, JAko
dc.contributor.authorKim, Soohyunko
dc.date.accessioned2007-12-18T05:56:53Z-
dc.date.available2007-12-18T05:56:53Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2001-09-
dc.identifier.citationMEASUREMENT SCIENCE TECHNOLOGY, v.12, no.9, pp.1495 - 1502-
dc.identifier.issn0957-0233-
dc.identifier.urihttp://hdl.handle.net/10203/2511-
dc.description.abstractA new multi-degree-of-freedom measurement system for milli-structures is presented. This methodology is based on optical beam deflection method and triangulation. It employs a diffraction grating as a reflective object, which reflects an incident laser beam into several directions. To obtain the pose information of a measured object, the detecting positions of zeroth- and first-order diffracted rays are measured using three two-dimensional detectors. From these values, we can calculate six-degree-of-freedom displacement through a kinematic analysis. The performance was evaluated with resolution, measurement errors and crosstalk. The results show that measurement errors and maximum crosstalk are within +/-0.5 mum in translation and +/-2 " in rotation. As an application, we measured the multi-DOF motion of a bimorph type PZT actuator and obtained its frequency response function.-
dc.description.sponsorshipThis work is supported in part by the Brain Korea 21 project.en
dc.languageEnglish-
dc.language.isoen_USen
dc.publisherIOP PUBLISHING LTD-
dc.subjectDISK-DRIVE-
dc.titleMulti-degree-of-freedom displacement measurement system for milli-structures-
dc.typeArticle-
dc.identifier.wosid000171324000018-
dc.identifier.scopusid2-s2.0-0035447310-
dc.type.rimsART-
dc.citation.volume12-
dc.citation.issue9-
dc.citation.beginningpage1495-
dc.citation.endingpage1502-
dc.citation.publicationnameMEASUREMENT SCIENCE TECHNOLOGY-
dc.identifier.doi10.1088/0957-0233/12/9/316-
dc.embargo.liftdate9999-12-31-
dc.embargo.terms9999-12-31-
dc.contributor.localauthorKim, Soohyun-
dc.contributor.nonIdAuthorBae, EW-
dc.contributor.nonIdAuthorKim, JA-
dc.type.journalArticleArticle-
dc.subject.keywordAuthormulti-DOF-
dc.subject.keywordAuthormilli-structure-
dc.subject.keywordAuthordiffraction grating-
dc.subject.keywordAuthorOBDM-
dc.subject.keywordAuthorquadrant detector-
dc.subject.keywordPlusDISK-DRIVE-
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