DC Field | Value | Language |
---|---|---|
dc.contributor.author | Bae, EW | ko |
dc.contributor.author | Kim, JA | ko |
dc.contributor.author | Kim, Soohyun | ko |
dc.date.accessioned | 2007-12-18T05:56:53Z | - |
dc.date.available | 2007-12-18T05:56:53Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2001-09 | - |
dc.identifier.citation | MEASUREMENT SCIENCE TECHNOLOGY, v.12, no.9, pp.1495 - 1502 | - |
dc.identifier.issn | 0957-0233 | - |
dc.identifier.uri | http://hdl.handle.net/10203/2511 | - |
dc.description.abstract | A new multi-degree-of-freedom measurement system for milli-structures is presented. This methodology is based on optical beam deflection method and triangulation. It employs a diffraction grating as a reflective object, which reflects an incident laser beam into several directions. To obtain the pose information of a measured object, the detecting positions of zeroth- and first-order diffracted rays are measured using three two-dimensional detectors. From these values, we can calculate six-degree-of-freedom displacement through a kinematic analysis. The performance was evaluated with resolution, measurement errors and crosstalk. The results show that measurement errors and maximum crosstalk are within +/-0.5 mum in translation and +/-2 " in rotation. As an application, we measured the multi-DOF motion of a bimorph type PZT actuator and obtained its frequency response function. | - |
dc.description.sponsorship | This work is supported in part by the Brain Korea 21 project. | en |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | IOP PUBLISHING LTD | - |
dc.subject | DISK-DRIVE | - |
dc.title | Multi-degree-of-freedom displacement measurement system for milli-structures | - |
dc.type | Article | - |
dc.identifier.wosid | 000171324000018 | - |
dc.identifier.scopusid | 2-s2.0-0035447310 | - |
dc.type.rims | ART | - |
dc.citation.volume | 12 | - |
dc.citation.issue | 9 | - |
dc.citation.beginningpage | 1495 | - |
dc.citation.endingpage | 1502 | - |
dc.citation.publicationname | MEASUREMENT SCIENCE TECHNOLOGY | - |
dc.identifier.doi | 10.1088/0957-0233/12/9/316 | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Kim, Soohyun | - |
dc.contributor.nonIdAuthor | Bae, EW | - |
dc.contributor.nonIdAuthor | Kim, JA | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | multi-DOF | - |
dc.subject.keywordAuthor | milli-structure | - |
dc.subject.keywordAuthor | diffraction grating | - |
dc.subject.keywordAuthor | OBDM | - |
dc.subject.keywordAuthor | quadrant detector | - |
dc.subject.keywordPlus | DISK-DRIVE | - |
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