Formation of PZT from multilayer-structured PbTiO3 and PbZrO3 thin films prepared by plasma-enhanced chemical vapor deposition

Cited 3 time in webofscience Cited 0 time in scopus
  • Hit : 27
  • Download : 0
From the amorphous multilayer thin films composed of PbTiO3 and PbZrO3 formed by a plasma-enhanced metal-organic chemical vapor deposition method, we have prepared single-phase PZT thin films by interdiffusion through an appropriate thermal annealing process. The transformation to a single-phase PZT from the multilayer was initiated at around 450degreesC and was almost completed at 550degreesC under an annealing time of 1 h. Typically, when a fourfold layer of PbZrO3/PbTiO3/PbZrO3/PbTiO3 was constructed and sequentially annealed at 650degreesC under ambient O-2 for 1 h, the resulting films showed characteristics of a perovskite-type PZT and a uniform distribution of each element along the depth of the film. The electrical properties of the prepared PZT thin film (Zr/Ti = 54/46, 180 nm) on a Pt-coated substrate were as follows: dielectric constant epsilon(r) = 415, coercive field E-c = 200 and - 140 kV/cm, and remanant polarization P-r = 12 muC/cm(2) at an applied voltage of 6 V.
Publisher
KOREAN SOC INDUSTRIAL ENGINEERING CHEMISTRY
Issue Date
2004-05
Language
English
Article Type
Article
Keywords

LEAD-ZIRCONATE; CERAMICS; SYSTEMS

Citation

JOURNAL OF INDUSTRIAL AND ENGINEERING CHEMISTRY, v.10, no.3, pp.379 - 383

ISSN
1226-086X
URI
http://hdl.handle.net/10203/250957
Appears in Collection
CBE-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 3 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0