Spontaneous Registration of Sub-10 nm Features Based on Subzero Celsius Spin-Casting of Self-Assembling Building Blocks Directed by Chemically Encoded Surfaces

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dc.contributor.authorLee, Jung Hyeko
dc.contributor.authorChoi, Hak-Jongko
dc.contributor.authorLee, Chulheeko
dc.contributor.authorSong, Seung Wonko
dc.contributor.authorLee, Joong Bumko
dc.contributor.authorHuh, Daihongko
dc.contributor.authorNam, Yoon Sungko
dc.contributor.authorJeon, Duk Youngko
dc.contributor.authorLee, Heonko
dc.contributor.authorJung, Yeon Sikko
dc.date.accessioned2019-01-22T08:37:39Z-
dc.date.available2019-01-22T08:37:39Z-
dc.date.created2018-12-05-
dc.date.created2018-12-05-
dc.date.issued2018-08-
dc.identifier.citationACS NANO, v.12, no.8, pp.8224 - 8233-
dc.identifier.issn1936-0851-
dc.identifier.urihttp://hdl.handle.net/10203/249047-
dc.description.abstractFor low-cost and facile fabrication of innovative nanoscale devices with outstanding functionality and performance, it is critical to develop more practical patterning solutions that are applicable to a wide range of materials and feature sizes while minimizing detrimental effects by processing conditions. In this study, we report that area-selective sub-10 nm pattern formation can be realized by temperature-controlled spin-casting of block copolymers (BCPs) combined with submicron-scale-patterned chemical surfaces. Compared to conventional room-temperature spin-casting, the low temperature (e.g., −5 °C) casting of the BCP solution on the patterned self-assembled monolayer achieved substantially improved area selectivity and uniformity, which can be explained by optimized solvent evaporation kinetics during the last stage of film formation. Moreover, the application of cold spin-casting can also provide high-yield in situ patterning of light-emitting CdSe/ZnS quantum dot thin films, indicating that this temperature-optimized spin-casting strategy would be highly effective for tailored patterning of diverse organic and hybrid materials in solution phase.-
dc.languageEnglish-
dc.publisherAMER CHEMICAL SOC-
dc.titleSpontaneous Registration of Sub-10 nm Features Based on Subzero Celsius Spin-Casting of Self-Assembling Building Blocks Directed by Chemically Encoded Surfaces-
dc.typeArticle-
dc.identifier.wosid000443525600073-
dc.identifier.scopusid2-s2.0-85052321321-
dc.type.rimsART-
dc.citation.volume12-
dc.citation.issue8-
dc.citation.beginningpage8224-
dc.citation.endingpage8233-
dc.citation.publicationnameACS NANO-
dc.identifier.doi10.1021/acsnano.8b03378-
dc.contributor.localauthorNam, Yoon Sung-
dc.contributor.localauthorJeon, Duk Young-
dc.contributor.localauthorJung, Yeon Sik-
dc.contributor.nonIdAuthorChoi, Hak-Jong-
dc.contributor.nonIdAuthorHuh, Daihong-
dc.contributor.nonIdAuthorLee, Heon-
dc.description.isOpenAccessN-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorspontaneous registration-
dc.subject.keywordAuthorcold spin-casting-
dc.subject.keywordAuthorself-assembled monolayer-
dc.subject.keywordAuthorblock copolymers-
dc.subject.keywordAuthorquantum dots-
dc.subject.keywordPlusATOMIC LAYER DEPOSITION-
dc.subject.keywordPlusNANO-IMPRINT LITHOGRAPHY-
dc.subject.keywordPlusSOFT LITHOGRAPHY-
dc.subject.keywordPlusDIBLOCK COPOLYMER-
dc.subject.keywordPlusPATTERNS-
dc.subject.keywordPlusPOLYMER-
dc.subject.keywordPlusMONOLAYERS-
dc.subject.keywordPlusFABRICATION-
dc.subject.keywordPlusMICROSCOPY-
dc.subject.keywordPlusARRAYS-
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