A high-resolution lensless fluorescence imaging system using membrane deflection for reducing gap between samples and image sensor

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This paper reports on a high-resolution lensless fluorescence imaging system using membrane deflection for reducing the gap between fluorescent samples and a CMOS image sensor array. The presented system applied the principle of the total internal reflection of excitation light inside a PDMS chip to minimize the exposure of excitation light to the image sensor. We integrated a very thin (5.5 μm) PDMS membrane as a flexible deflector, which allowed for significant reduction of the gap (∼20 μm) inevitably created during the conventional packaging (i.e., wire bonding) of image sensors. In the fabricated system, we achieved minimum distance of 7.5 μm between fluorescent samples and an image sensor array. This reduced gap almost directly corresponds to a resolution as high as ∼7.5 μm, based on the point spread function (PSF).
Publisher
Institute of Electrical and Electronics Engineers Inc.
Issue Date
2018-01-23
Language
English
Citation

31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, pp.419 - 421

DOI
10.1109/MEMSYS.2018.8346577
URI
http://hdl.handle.net/10203/247557
Appears in Collection
EE-Conference Papers(학술회의논문)
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