DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jang, Juhyeok | ko |
dc.contributor.author | Park, Sanghoo | ko |
dc.contributor.author | Park, Jooyoung | ko |
dc.contributor.author | Choe, Wonho | ko |
dc.date.accessioned | 2018-11-12T04:17:59Z | - |
dc.date.available | 2018-11-12T04:17:59Z | - |
dc.date.created | 2018-10-22 | - |
dc.date.created | 2018-10-22 | - |
dc.date.created | 2018-10-22 | - |
dc.date.created | 2018-10-22 | - |
dc.date.created | 2018-10-22 | - |
dc.date.created | 2018-10-22 | - |
dc.date.issued | 2018-10 | - |
dc.identifier.citation | PLASMA SOURCES SCIENCE & TECHNOLOGY, v.27, no.10, pp.10LT01 | - |
dc.identifier.issn | 0963-0252 | - |
dc.identifier.uri | http://hdl.handle.net/10203/246308 | - |
dc.description.abstract | Optical emission spectral tomography diagnostics have been developed to measure the spatial uniformity of meter-sized processing plasmas. The lines of sight and detector location are selected based on tomographic reconstruction tests using synthetic (phantom) images. The developed collection optics system is composed of slits, a plano-convex lens, optical interference filters and photodiode arrays. Using the collection optics, the line-integrated emission intensity is acquired from a meter-sized rectangular argon plasma (inductively coupled plasma at a frequency of 13.56 MHz), which was developed for display panel manufacturing. From the measured intensity, two-dimensional (2D) spatial distributions of argon atomic line intensity (675.3 nm and 852.1 nm) are obtained via the tomographic reconstruction technique based on the Phillips-Tikhonov regularization. In addition, 2D profiles of the electron excitation temperature (T-exc) are obtained from those of Ar intensity at the wavelengths 675.3 nm and 852.1 nm via two line method (in essence, a Boltzmann plot). The 2D argon plasma emission and T-exc profiles match well with the shape of the electrode and etch rate profile. | - |
dc.language | English | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.title | Tomography-based spatial uniformity diagnostics for meter-sized plasmas | - |
dc.type | Article | - |
dc.identifier.wosid | 000446882700001 | - |
dc.identifier.scopusid | 2-s2.0-85055449872 | - |
dc.type.rims | ART | - |
dc.citation.volume | 27 | - |
dc.citation.issue | 10 | - |
dc.citation.beginningpage | 10LT01 | - |
dc.citation.publicationname | PLASMA SOURCES SCIENCE & TECHNOLOGY | - |
dc.identifier.doi | 10.1088/1361-6595/aac671 | - |
dc.contributor.localauthor | Park, Sanghoo | - |
dc.contributor.localauthor | Choe, Wonho | - |
dc.description.isOpenAccess | Y | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | etching | - |
dc.subject.keywordAuthor | optical emission spectroscopy | - |
dc.subject.keywordAuthor | tomography | - |
dc.subject.keywordAuthor | plasma uniformity | - |
dc.subject.keywordPlus | PHILLIPS-TIKHONOV REGULARIZATION | - |
dc.subject.keywordPlus | GENERALIZED CROSS-VALIDATION | - |
dc.subject.keywordPlus | SCALE INTEGRATED-CIRCUIT | - |
dc.subject.keywordPlus | KSTAR PLASMAS | - |
dc.subject.keywordPlus | RECONSTRUCTION | - |
dc.subject.keywordPlus | REACTORS | - |
dc.subject.keywordPlus | SYSTEM | - |
dc.subject.keywordPlus | CAMERA | - |
dc.subject.keywordPlus | IMAGE | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.