Tomography-based spatial uniformity diagnostics for meter-sized plasmas

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Optical emission spectral tomography diagnostics have been developed to measure the spatial uniformity of meter-sized processing plasmas. The lines of sight and detector location are selected based on tomographic reconstruction tests using synthetic (phantom) images. The developed collection optics system is composed of slits, a plano-convex lens, optical interference filters and photodiode arrays. Using the collection optics, the line-integrated emission intensity is acquired from a meter-sized rectangular argon plasma (inductively coupled plasma at a frequency of 13.56 MHz), which was developed for display panel manufacturing. From the measured intensity, two-dimensional (2D) spatial distributions of argon atomic line intensity (675.3 nm and 852.1 nm) are obtained via the tomographic reconstruction technique based on the Phillips-Tikhonov regularization. In addition, 2D profiles of the electron excitation temperature (T-exc) are obtained from those of Ar intensity at the wavelengths 675.3 nm and 852.1 nm via two line method (in essence, a Boltzmann plot). The 2D argon plasma emission and T-exc profiles match well with the shape of the electrode and etch rate profile.
Publisher
IOP PUBLISHING LTD
Issue Date
2018-10
Language
English
Article Type
Article
Citation

PLASMA SOURCES SCIENCE & TECHNOLOGY, v.27, no.10, pp.10LT01

ISSN
0963-0252
DOI
10.1088/1361-6595/aac671
URI
http://hdl.handle.net/10203/246308
Appears in Collection
NE-Journal Papers(저널논문)
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