Feedback control of local hotspot temperature using resistive on-substrate nanoheater/thermometer

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This article reports the active control of a local hotspot temperature for accurate nanoscale thermal transport measurement. To this end, we have fabricated resistive on-substrate nanoheater/thermometer (NH/T) devices that have a sensing area of similar to 350 nm x 300 nm. Feedback-controlled temporal heating and cooling experiments of the NH/T device confirm that the feedback integral gain plays a dominant role in device's response time for various setpoint temperatures. To further verify the integration of the feedback controller with the NH/T devices, a local tip-induced cooling experiment is performed by scanning a silicon tip over the hotspot area in an atomic force microscope platform. By carefully optimizing the feedback gain and the tip scan speed, we can control the hotspot temperature with the accuracy of similar to +/- 1 K for a broad range of setpoints from 325 K to 355 K. The obtained tip-substrate thermal conductance, including the effects of solid-solid conduction, water meniscus, air conduction, and near-field thermal radiation, is found to be a slightly increasing function of temperature in the range of 127 +/- 25 to 179 +/- 16 nW/K. Our work demonstrates the reliable controllability of a local hotspot temperature, which will allow the further improvement of various nanoscale thermal metrologies including scanning thermal microscopy and nanoscale thermometry. Published by AIP Publishing.
Publisher
AMER INST PHYSICS
Issue Date
2018-06
Language
English
Article Type
Article
Keywords

SCANNING THERMAL MICROSCOPY; RADIATIVE HEAT-TRANSFER; EXTREME NEAR-FIELD; QUANTITATIVE THERMOMETRY; NANOSCALE; TRANSPORT; NANOSTRUCTURES; THERMOCOUPLE; JUNCTIONS; CONTACTS

Citation

REVIEW OF SCIENTIFIC INSTRUMENTS, v.89, no.6

ISSN
0034-6748
DOI
10.1063/1.5020884
URI
http://hdl.handle.net/10203/244690
Appears in Collection
ME-Journal Papers(저널논문)
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