Electron heating in rf capacitive discharges at atmospheric-to-subatmospheric pressures

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Electron heating is a fundamental and multidisciplinary phenomenon in partially ionized gases, from the planet's ionosphere to laboratory-scale plasmas. Plasmas produced at ambient or reduced pressures have recently shown potential for scientific and industrial applications. However, electron heating, which is strongly coupled to the physicochemical properties of these plasmas, has been poorly understood. We experimentally found the rapid structural transition from non-local to local electron heating in collisional radio-frequency discharges at atmospheric-to-subatmospheric pressures. As the gas pressure decreased from 760 to 200 Torr, the time-averaged electron density increased from 1.3 x 10(12) to 1.3 x 10(13) cm(-3), and the electron temperature decreased from 2.5 to 1.1 eV at the maximum allowable discharge current in the abnormal alpha-mode in the plasma bulk. The spatiotemporal evolution of the electron temperature clearly shows that the electron temperature increases uniformly throughout the bulk plasma region during sheath expansion and collapse at 760 Torr, but the electron heating weakens with sheath collapse as the gas pressure decreases.
Publisher
NATURE PUBLISHING GROUP
Issue Date
2018-07
Language
English
Article Type
Article
Citation

SCIENTIFIC REPORTS, v.8, pp.10217

ISSN
2045-2322
DOI
10.1038/s41598-018-27945-6
URI
http://hdl.handle.net/10203/244659
Appears in Collection
NE-Journal Papers(저널논문)
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