An education model of a nano-positioning system for mechanical engineers

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The increasing use of nano-positioners in a wide variety of laboratory and industrial applications has created a need for nano-mechatronics education in all engineering disciplines. The subject of nano-mechatronics is broad and interdisciplinary. This article focuses on the way nano-mechatronics is taught in department of mechanical engineering at Korea Advanced Institute of Science and Technology (KAIST). As one model of nano-positioning systems, design and experimental methodology is presented in this article. For design phase, the stiffness and resonant frequencies are found analytically and verified by using a commercial finite element analysis program. Next, for experimental phase, various tests are performed to access the performances of the designed nano-positioner, for example, sine-tracking, multi-step response and travel-range check etc. Finally, the definition of "separation frequency" is described and some comments are discussed.
Publisher
KOREAN SOC MECHANICAL ENGINEERS
Issue Date
2006-10
Language
English
Article Type
Article
Keywords

ATOMIC-FORCE MICROSCOPE; MECHATRONICS; DESIGN; CURRICULUM; STUDENTS; SPEED

Citation

JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, v.20, no.10, pp.1702 - 1715

ISSN
1738-494X
DOI
10.1007/BF02916274
URI
http://hdl.handle.net/10203/24401
Appears in Collection
ME-Journal Papers(저널논문)
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