학위논문(석사) - 한국과학기술원 : 기계공학과, 2017.2,[vi, 56 p. :]
brittle thin film; mechanical property; top down; bottom up; size effect; deposition temperature; 취성박막; 기계적 성질; 탑다운; 바텀업; 크기효과; 결정 방향; 증착온도
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