Material-Independent Nanotransfer onto a Flexible Substrate Using Mechanical-Interlocking Structure

Cited 20 time in webofscience Cited 0 time in scopus
  • Hit : 578
  • Download : 0
Nanowire-transfer technology has received much attention thanks to its capability to fabricate high-performance flexible nanodevices with high simplicity and throughput. However, it is still challenging to extend the conventional nanowire-transfer method to the fabrication of a wide range of devices since a chemical-adhesion-based nanowire-transfer mechanism is complex and time-consuming, hindering successful transfer of diverse nanowires made of various materials. Here, we introduce a material-independent mechanical-interlocking based nanowire-transfer (MINT) method, fabricating ultralong and fully aligned nanowires on a large flexible substrate (2.5 X 2 cm(2)) in a highly robust manner. For the material-independent nanotransfer, we developed a mechanics-based nanotransfer method, which employs a dry-removable amorphous carbon (a-C) sacrificial layer between a vacuum-deposited nanowire and the underlying master mold. The controlled etching of the sacrificial layer enables the formation of a mechanical interlocking structure under the nanowire, facilitating peeling off of the nanowire from the master mold robustly and reliably. Using the developed MINT method, we successfully fabricated various metallic and semiconductor nanowire arrays on flexible substrates. We further demonstrated that the developed method is well suited to the reliable fabrication of highly flexible and high-performance nanoelectronic devices. As examples, a fully aligned gold (Au) microheater array exhibited high bending stability (10(6) cycling) and ultrafast (similar to 220 ms) heating operation up to similar to 100 degrees C. An ultralong Au heater-embedded cuprous-oxide (Cu2O) nanowire chemical gas sensor showed significantly improved reversible reaction kinetics toward NO2 with 10-fold enhancement in sensitivity at 100 degrees C.
Publisher
AMER CHEMICAL SOC
Issue Date
2018-05
Language
English
Article Type
Article
Keywords

AMORPHOUS-CARBON FILMS; NANOWIRE ARRAYS; THERMAL-DEGRADATION; CHEMICAL SENSORS; FABRICATION; TEMPERATURE; ELECTRODE; HEATERS; DEVICES; GROWTH

Citation

ACS NANO, v.12, no.5, pp.4387 - 4397

ISSN
1936-0851
DOI
10.1021/acsnano.8b00159
URI
http://hdl.handle.net/10203/242625
Appears in Collection
MS-Journal Papers(저널논문)EE-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 20 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0