학위논문(박사) - 한국과학기술원 : 산업및시스템공학과, 2017.2,[vi, 98 p. :]
Cluster Tool; Scheduling; Chamber Cleaning; Partial Loading; Parallel Chambers; Wafer Delay; Time Constraint; 클러스터 장비; 스케줄링; 챔버 클리닝; 병렬챔버; 부분 적재; 웨이퍼 지연; 시간제약
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