Layer-by-layer assembly of two-dimensional materials into wafer-scale heterostructures

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dc.contributor.authorKang, Kibumko
dc.contributor.authorLee, Kan-Hengko
dc.contributor.authorHan, Yimoko
dc.contributor.authorGao, Huiko
dc.contributor.authorXie, Saienko
dc.contributor.authorMuller, David A.ko
dc.contributor.authorPark, Jiwoongko
dc.date.accessioned2018-01-30T04:20:51Z-
dc.date.available2018-01-30T04:20:51Z-
dc.date.created2018-01-09-
dc.date.created2018-01-09-
dc.date.issued2017-10-
dc.identifier.citationNATURE, v.550, no.7675, pp.229 - 233-
dc.identifier.issn0028-0836-
dc.identifier.urihttp://hdl.handle.net/10203/238836-
dc.description.abstractHigh-performance semiconductor films with vertical compositions that are designed to atomic-scale precision provide the foundation for modern integrated circuitry and novel materials discovery(1-3). One approach to realizing such films is sequential layer-by-layer assembly, whereby atomically thin two-dimensional building blocks are vertically stacked, and held together by van der Waals interactions'. With this approach, graphene and transition-metal dichalcogenides-which represent one- and three -atom-thick two-dimensional building blocks, respectively have been used to realize previously inaccessible heterostructures with interesting physical properties(7-11). However, no large-scale assembly method exists at present that maintains the intrinsic properties of these two-dimensional building blocks while producing pristine interlayer interfaces(12-15), thus limiting the layer-by-layer assembly method to small-scale proof-of-concept demonstrations. Here we report the generation of wafer-scale semiconductor films with a very high level of spatial uniformity and pristine interfaces. The vertical composition and properties of these films are designed at the atomic scale using layer-by-layer assembly of two-dimensional building blocks under vacuum. We fabricate several large-scale, high-quality heterostructure films and devices, including superlattice films with vertical compositions designed layer-by-layer, batch-fabricated tunnel device arrays with resistances that can be tuned over four orders of magnitude, band-engineered heterostructure tunnel diodes, and millimetre-scale ultrathin membranes and windows. The stacked films are detachable, suspendable and compatible with water or plastic surfaces, which will enable their integration with advanced optical and mechanical systems.-
dc.languageEnglish-
dc.publisherNATURE PUBLISHING GROUP-
dc.subjectDER-WAALS HETEROSTRUCTURES-
dc.subjectGRAPHENE-
dc.subjectCRYSTALS-
dc.subjectFILMS-
dc.subjectLASER-
dc.titleLayer-by-layer assembly of two-dimensional materials into wafer-scale heterostructures-
dc.typeArticle-
dc.identifier.wosid000412829500043-
dc.identifier.scopusid2-s2.0-85031309721-
dc.type.rimsART-
dc.citation.volume550-
dc.citation.issue7675-
dc.citation.beginningpage229-
dc.citation.endingpage233-
dc.citation.publicationnameNATURE-
dc.identifier.doi10.1038/nature23905-
dc.contributor.localauthorKang, Kibum-
dc.contributor.nonIdAuthorLee, Kan-Heng-
dc.contributor.nonIdAuthorHan, Yimo-
dc.contributor.nonIdAuthorGao, Hui-
dc.contributor.nonIdAuthorXie, Saien-
dc.contributor.nonIdAuthorMuller, David A.-
dc.contributor.nonIdAuthorPark, Jiwoong-
dc.description.isOpenAccessN-
dc.type.journalArticleArticle-
dc.subject.keywordPlusDER-WAALS HETEROSTRUCTURES-
dc.subject.keywordPlusGRAPHENE-
dc.subject.keywordPlusCRYSTALS-
dc.subject.keywordPlusFILMS-
dc.subject.keywordPlusLASER-
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