Improvement of the thermal stability of Nb:TiO2-x samples for uncooled infrared detectors

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In order to reduce the sun-burn effect in a sample of the bolometric material Nb:TiO2-x, oxygen annealing was carried out. This effect can be examined by comparing thermal stability test results between the as-deposited and oxygen-atmosphere-annealed samples under high-temperature exposure conditions. Structural studies confirm the presence of amorphous and rutile phases in the as-deposited and annealed samples, respectively. Composition studies reveal the offset of oxygen vacancies in the Nb:TiO2-x samples through oxygen-atmosphere annealing. The oxygen atoms were diffused and seemed to occupy the vacant sites in the annealed samples. As a result, the annealed samples show better thermal stability performance than the as-deposited samples. The universal bolometric parameter (beta) values were slightly decreased in the oxygen-annealed Nb:TiO2-x samples. Although bolometric performance was slightly decreased in the oxygen-annealed samples, high thermal stability would be the most essential factor in the case of special applications, such as the military and space industries. Finally, these results will be very useful for reducing the sun-burn effect in infrared detectors.
Publisher
IOP PUBLISHING LTD
Issue Date
2018-01
Language
English
Article Type
Article
Keywords

TIO2 THIN-FILMS; OXYGEN VACANCY; BOLOMETER; DESIGN; ARRAYS; CONDUCTIVITY; SPECTROSCOPY; DEPOSITION; SUBSTRATE; SILICON

Citation

JOURNAL OF PHYSICS D-APPLIED PHYSICS, v.51, no.2

ISSN
0022-3727
DOI
10.1088/1361-6463/aa9b60
URI
http://hdl.handle.net/10203/238748
Appears in Collection
EE-Journal Papers(저널논문)
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