Oxidation behavior of AlN/CrN multilayered hard coatings

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We report on the oxidation behavior of AlN/CrN multilayers at 900 °C, deposited by radio frequency magnetron sputtering. It is shown that oxidation in this system is controlled by diffusion of Cr towards the surface and formation of Cr2O3. Cr diffusion is found to mainly occur along grain boundaries. Thus, coherent cubic AlN/CrN multilayer regions with coarse columnar grain structures are found to be oxidation resistant, whereas regions decomposed into hexagonal AlN/cubic CrN are prone to oxidation.
Publisher
SPRINGEROPEN
Issue Date
2017-06
Language
English
Article Type
Article
Citation

NANO CONVERGENCE, v.4, no.15, pp.15

ISSN
2196-5404
DOI
10.1186/s40580-017-0109-y
URI
http://hdl.handle.net/10203/237735
Appears in Collection
MS-Journal Papers(저널논문)
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