플라즈마 처리장치 및 플라즈마 처리방법PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Assignee
- KAIST
- Country
- CC (Cocos (Keeling) Islands)
- Issue Date
- 2012-08-08
- Application Date
- 2008-02-05
- Application Number
- 200810100302.0
- Registration Date
- 2012-08-08
- Registration Number
- ZL200810100302.0
- Appears in Collection
- PH-Patent(특허)
- Files in This Item
- There are no files associated with this item.
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