Gas electron multiplier made by deep-etch X-ray lithography

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dAs an alternative design for a gas electron multiplier (GEM), which is a charge preamplifying device when coupled with any gas avalanche microdetector, arrays of holes having steep walls have been successfully prepared on polymethylmethacrylate (PMMA) plastic sheets of various thicknesses by using a deep-etch X-ray lithography or LIGA process. The first measurements of performance were very promising. For a 300-mum-thick LlGA device, an avalanche gain of similar to3 x 10(3) was obtained from anode strips having the 10-mum width of the microstrip gas chamber (MSGC) used as a readout collection plane. The short-term stability of the gain was found to be constant, within 2% change of the gain over a one and one-half hour period, and the rate capability was extended to more than 10(5), mm(-2).s(-1).
Publisher
KOREAN PHYSICAL SOC
Issue Date
2002
Language
English
Article Type
Article
Keywords

GEM; DETECTORS; OPERATION; GAIN; AMPLIFICATION; PERFORMANCE; TESTS; MSGC

Citation

JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.40, no.5, pp.812 - 819

ISSN
0374-4884
URI
http://hdl.handle.net/10203/23288
Appears in Collection
NE-Journal Papers(저널논문)MS-Journal Papers(저널논문)
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