Nanotransplantation Printing of Crystallographic-Orientation-Controlled Single-Crystalline Nanowire Arrays on Diverse Surfaces

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The fabrication of a highly ordered array of single-crystalline nanostructures prepared from solution-phase or vapor-phase synthesis methods is extremely challenging due to multiple difficulties of spatial arrangement and control of crystallographic orientation. Herein, we introduce a nanotransplantation printing (NTPP) technique for the reliable fabrication, transfer, and arrangement of single-crystalline Si nanowires (NWs) on diverse substrates. NTPP entails (1) formation of nanoscale etch mask patterns on conventional low-cost Si via nanotransfer printing, (2) two-step combinatorial plasma etching for defining Si NWs, and (3) detachment and transfer of the NWs onto various receiver substrates using an infiltration-type polymeric transfer medium and a solvent-assisted adhesion switching mechanism. Using this approach, high-quality, highly ordered Si NWs can be formed on almost any type of surface including flexible plastic substrates, biological surfaces, and deep-trench structures. Moreover, NTPP provides controllability of the crystallographic orientation of NWs, which is confirmed by the successful generation of (100)- and (110)-oriented Si NWs with different properties. The outstanding electrical properties of the NWs were confirmed by fabricating and characterizing Schottky junction field-effect transistors. Furthermore, exploiting the highly flexible nature of the NWs, a high-performance piezoresistive strain sensor, with a high gauge factor over 200 was realized.
Publisher
AMER CHEMICAL SOC
Issue Date
2017-11
Language
English
Article Type
Article
Keywords

PERFORMANCE FLEXIBLE ELECTRONICS; CONCENTRATED POLYMER BRUSHES; THIN-FILM TRANSISTORS; SILICON NANOWIRES; BLOCK-COPOLYMER; SEMICONDUCTOR NANOWIRES; EPIDERMAL ELECTRONICS; LUBRICATION MECHANISM; BULK WAFERS; SKIN

Citation

ACS NANO, v.11, no.11, pp.11642 - 11652

ISSN
1936-0851
DOI
10.1021/acsnano.7b06696
URI
http://hdl.handle.net/10203/228609
Appears in Collection
EE-Journal Papers(저널논문)MS-Journal Papers(저널논문)ME-Journal Papers(저널논문)
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